| 000 | 00381nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 250909s9999||||xx |||||||||||||| ||und|| | ||
| 035 | _a1554 | ||
| 082 | _a621.3 | ||
| 100 | _aLIU C. | ||
| 245 | 0 | _aFOUNDATIONS OF MEMS | |
| 250 | _a2 | ||
| 260 |
_bPEARSON EDU. _c2017 |
||
| 300 | _a1-576 | ||
| 500 | _aSE/SI/4019 | ||
| 650 | _aELECTRONICS AND TELECOMMUNICATION | ||
| 942 | _cBK | ||
| 999 |
_c19730 _d19730 |
||